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氣浮式大行程影像測量儀
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氣浮式系列大行程全自動影像測量儀主要應(yīng)用在PCB線路板、覆銅板、平板玻璃、液晶模組、刀模、絕緣材料等行業(yè)。
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儀器特點：
 
該系列氣浮式大行程影像測量儀采用龍門式結(jié)構(gòu)(橋架式)運行性能穩(wěn)定，且機構(gòu)穩(wěn)定不變形。X、Y、Z三軸均采用伺服電機、全采用雙重閉環(huán)運動控制、可保證電機在中、高速動動時的穩(wěn)定性，和準(zhǔn)確的定位功能，影像Z軸可自動對焦、配合自動變焦鏡頭，可實現(xiàn)自動變焦而不需倍率校正。
氣浮式大行程影像測量儀
氣浮型影像測量儀 VMS-5030 VMS-6040
 
工作臺

金屬臺面尺寸(mm) 760×640 730×530
玻璃臺面尺寸(mm) 550×350 650×450
運動行程(mm) 500×300 600×400
Z軸升降行程 200mm
工作距離 92mm
 X、Y、Z數(shù)顯解析度 1μm
 X、Y坐標(biāo)示值誤差 ≤(3+L/200)μm
 影像系統(tǒng)
 攝影機： 日本原裝彩色1/2″CCD攝像機 
 變焦物鏡倍率： 0.7~4.5X 或自動變焦鏡頭
 視頻總倍率： 30X~190X
 物方視場： 10.6~1.6mm 表面光源與透射光源均用LED，48組可編程。
 測量系統(tǒng) QuickMeasuring測量軟件

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